Number：

01097003

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Name：

梁元彰

Titles：

Associate professor

Author：

Yuan-Chang Liang* Chi-Chiuan Kuo Chi-Chang Liu Yuan-Ching Liang

Paper name：

Structural and opto-electronic properties of transparent conducting (222)-textured Zr-doped In₂O₃/ZnO bilayer films

Name of activity：

Journal of Crystal Growth

Keywords：characterization , doping , surface structure , oxides

Abstract：

5wt% Zr-doped In₂O₃ (Zr-In₂O₃) films with thicknesses from 85 to 210 nm were grown on the 80nm-thick ZnO-coated glass substrates at 160℃ by rf sputtering. The microstructures of the Zr-In₂O₃/ZnO bilayer films were studied using X-ray diffraction and atomic force microscopy. The ZnO buffer layers on the glass substrates exhibit (0 0 2) preferred orientation. The Zr-In₂O₃ films have highly (2 2 2)-textured structures on the ZnO-coated glass substrates. The electrical characteristics of Zr-In₂O₃ films are improved by lattice modulation with ZnO buffering. The resistivity is lowest 3.02 x 10^-4 Ωcm for the 210nm-thick Zr-In₂O₃ film on the ZnO-coated glass. The average transmittance in visible wavelength region is 83-86% for Zr-In₂O₃/ZnO bilayers with various Zr-In₂O₃ film thicknesses of 85-210nm. The low-temperature processes of Zr-In₂O₃/ZnO bilayer films on the glass substrates have potential for application to opto-electronic devices.

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