Number：

01099008

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Name：

Chi-Chang Liu

Titles：

Assistant Professor

Author：

Chin-Chiuan Kuo、Chi-Chang Liu、Yaug-Fea Jeng、

Chung-Chih Lin、and Ju-Liang He

Paper name：

Thickness Dependence of Optoelectrical Properties of Mo-Doped In2O3 Films Deposited on Polythersulfone Substrates by Ion-Bean-Assisted Evaporation

Name of activity：

Journal of Nanomaterials

Keywords：

Abstract：

Indium Molybdenum oxide (IMO) films were deposited onto the polythersulfone (PES) substrates by ion-beam-assisted evaporation (IBAE)deposition at low temperature in this study. The effects of film thickness on thir o[tical and electrical properties were investigated. The results show that the deposited IMO films exhivit a preferred orientation of B (222). The electrical resistivity of the depositd film initially reduces then subewquently increases with film thickness. The IMO film with the lowest resistivity of 7.61 x 10-4 ohm-cm has achieved when the film thickness is 120nm. It exhibits a satisfactory surface roughness R of 8.75 nm and an average visible transmittance of 78.7%.

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